[18a-B4-1~10] 6.6 Probe Microscopy

11:15 AM - 11:30 AM JST(2:15 AM - 2:30 AM UTC)

[18a-B4-10] Data Processing Method for High-Speed Three-dimensional Scanning Force Microscopy

〇Ryoshu Higashi¹, Yoichi Kumagai¹, Masayoshi Okamoto¹, Takeshi Fukuma¹, Kazuki Miyata^1,2 (1.Kanazawa Univ., 2.PRESTO/JST)

Keywords:

3D-SFM,Controller,Measurement acceleration