Presentation Information

[18p-A25-11]Pulse Duration Dependence of Electrical Properties of Ohmic Electrode on SiC by Ultrashort Pulsed Laser

〇Naoya Suto1, Hiroto Seki1, Takuya Kawakami1, Keisuke Takabayashi2,3, Eibon Tsuchiya2, Tsubasa Endo2, Yuusuke Takashima1, Kentaro Nagamatsu1, Yoshiki Naoi1, Makoto Yamaguchi3, Tatsuya Okada1, Yohei Kobayashi2, Takuro Tomita1 (1.Tokushima Univ., 2.ISSP Univ of Tokyo., 3.Akita Univ.)

Keywords:

Ultrashort Pulsed Laser,Ohmic electrode on SiC,Pulse Duration Dependence


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