[18p-A25-1~16] 3.6 Laser processing

4:15 PM - 4:30 PM JST(7:15 AM - 7:30 AM UTC)Presentation by Applicant for JSAP Young Scientists Presentation Award

[18p-A25-11] Pulse Duration Dependence of Electrical Properties of Ohmic Electrode on SiC by Ultrashort Pulsed Laser

〇Naoya Suto¹, Hiroto Seki¹, Takuya Kawakami¹, Keisuke Takabayashi^2,3, Eibon Tsuchiya², Tsubasa Endo², Yuusuke Takashima¹, Kentaro Nagamatsu¹, Yoshiki Naoi¹, Makoto Yamaguchi³, Tatsuya Okada¹, Yohei Kobayashi², Takuro Tomita¹ (1.Tokushima Univ., 2.ISSP Univ of Tokyo., 3.Akita Univ.)

Keywords:

Ultrashort Pulsed Laser,Ohmic electrode on SiC,Pulse Duration Dependence