[18p-A31-1~19] 8.2 Plasma deposition of thin film, plasma etching and surface treatment

1:30 PM - 1:45 PM JST(4:30 AM - 4:45 AM UTC)

[18p-A31-1] Discharge and thermal characteristics of atmospheric nitrogen plasma

〇JunSeok Oh¹, Tatsuru Shirafuji¹ (1.Osaka Metropol. Univ)

Keywords:

N2 plasma