[18p-C31-1~19] 12.7 Biomedical Engineering and Biochips

4:45 PM - 5:00 PM JST(7:45 AM - 8:00 AM UTC)Presentation by Applicant for JSAP Young Scientists Presentation Award

[18p-C31-14] Design and Fabrication of Capacitance Detection Pixel to expand measurement target of CMOS odor sensors

〇Tomoki Kamijo¹, Yasuyuki Kimura¹, Yoshiko Noda¹, Daisuke Akai¹, Takeshi Hizawa¹, Yong-Joon Choi¹, Kazuhiro Takahashi¹, Kazuaki Sawada¹, Toshihiko Noda¹ (1.Toyohashi University of Technology)

Keywords:

Odor Sensor,CMOS Sensor,Odor Membrane

In this study, we aimed to expand the target of gas and odor measurement by increasing the number of parameters that can be measured from the creation of pixels that detect changes in the capacitance of odor-sensitive membranes.
The fabricated capacitance-detecting pixels are configured to detect the voltage divider between the sensing membrane capacitance and the output circuit capacitance, and a 32×32 pixel array was fabricated by mixing them with pixels that detect the potential and resistance.
Evaluation was conducted using pixels for characteristic verification, and it was confirmed that the output voltage varied according to capacitance.