Presentation Information
[18p-C31-14]Design and Fabrication of Capacitance Detection Pixel to expand measurement target of CMOS odor sensors
〇Tomoki Kamijo1, Yasuyuki Kimura1, Yoshiko Noda1, Daisuke Akai1, Takeshi Hizawa1, Yong-Joon Choi1, Kazuhiro Takahashi1, Kazuaki Sawada1, Toshihiko Noda1 (1.Toyohashi University of Technology)
Keywords:
Odor Sensor,CMOS Sensor,Odor Membrane
In this study, we aimed to expand the target of gas and odor measurement by increasing the number of parameters that can be measured from the creation of pixels that detect changes in the capacitance of odor-sensitive membranes.
The fabricated capacitance-detecting pixels are configured to detect the voltage divider between the sensing membrane capacitance and the output circuit capacitance, and a 32×32 pixel array was fabricated by mixing them with pixels that detect the potential and resistance.
Evaluation was conducted using pixels for characteristic verification, and it was confirmed that the output voltage varied according to capacitance.
The fabricated capacitance-detecting pixels are configured to detect the voltage divider between the sensing membrane capacitance and the output circuit capacitance, and a 32×32 pixel array was fabricated by mixing them with pixels that detect the potential and resistance.
Evaluation was conducted using pixels for characteristic verification, and it was confirmed that the output voltage varied according to capacitance.
Comment
To browse or post comments, you must log in.Log in