[18p-C31-1~19] 12.7 Biomedical Engineering and Biochips

1:30 PM - 1:45 PM JST(4:30 AM - 4:45 AM UTC)Presentation by Applicant for JSAP Young Scientists Presentation Award

[18p-C31-3] Fabrication of One-piece ITO-TFT via sol-gel method allowing internal functionalization of channel

〇(D)Ritsu Katayama¹, Toshiya Sakata¹ (1.The univ. of Tokyo)

Keywords:

semiconductor,biosensor,Indium tin oxide

Solution-gated ITO-TFTs composed from a single ITO film (One-piece ITO-TFT) can be easily fabricated by etching a part of a 100-nm conductive ITO film to thin it down to about 20 nm to exhibit semiconductor properties. In this study, we fabricated one-piece ITO-TFTs by the sol-gel method, which is capable of fabricating nanostructures such as molecular templates. We aimed to fabricate molecular templates inside the channel.