[18p-C41-1~8] Interdisciplinary Expansion of Interfacial Nano-Electrochemistry -From Advanced Semiconductors to Biosciences-

1:30 PM - 2:00 PM JST(4:30 AM - 5:00 AM UTC)

[18p-C41-1] Mechanism of Nano-structures Stiction during drying after WET cleaning

〇Tatsuhiko Koide¹ (1.KIOXIA)

Keywords:

stiction,drying