The 85th JSAP Autumn Meeting 2024
Advanced Search

Presentation Information

1:30 PM - 2:00 PM JST(4:30 AM - 5:00 AM UTC)

[18p-C41-1]Mechanism of Nano-structures Stiction during drying after WET cleaning

〇Tatsuhiko Koide1 (1.KIOXIA)
PDF DownloadDownload PDF

Keywords:

stiction,drying

Comment

To browse or post comments, you must log in.Log in

Back to Session information