The 85th JSAP Autumn Meeting 2024
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Symposium (Oral)Symposium : Interdisciplinary Expansion of Interfacial Nano-Electrochemistry -From Advanced Semiconductors to Biosciences-

[18p-C41-1~8]Interdisciplinary Expansion of Interfacial Nano-Electrochemistry -From Advanced Semiconductors to Biosciences-

Wed. Sep 18, 2024 1:30 PM - 5:00 PM JST
Wed. Sep 18, 2024 4:30 AM - 8:00 AM UTC
C41 (Hotel Nikko 4F)
Yasuhito Yoshimizu(KIOXIA ), Yoshiyuki Seike(愛工大)
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Symposium Sponsor
Tokyo ElectronSCREEN Semiconductor
1:30 PM - 2:00 PM JST(4:30 AM - 5:00 AM UTC)

[18p-C41-1]Mechanism of Nano-structures Stiction during drying after WET cleaning

〇Tatsuhiko Koide1 (1.KIOXIA)
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2:00 PM - 2:30 PM JST(5:00 AM - 5:30 AM UTC)

[18p-C41-2]3D Observation of Transporting Nano-Particle near a Surface

〇Panart Khajornrungruang1 (1.Kyutech)
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2:30 PM - 2:45 PM JST(5:30 AM - 5:45 AM UTC)

[18p-C41-3]Three-Dimensional Numerical Simulation of Rinsing Chemical Solutions during Single-Wafer Spin Cleaning

〇Yoshinori Jinbo1, Toshiyuki Sanada1 (1.Shizuoka Univ.)
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3:00 PM - 3:30 PM JST(6:00 AM - 6:30 AM UTC)

[18p-C41-4]Biointerfaces showing a variety of interactions with liquids and gases.

〇Nobuyuki Tanaka1 (1.RIKEN)
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3:30 PM - 4:00 PM JST(6:30 AM - 7:00 AM UTC)

[18p-C41-5]Effect of Hydrophobicity and Surface Potential of Silicon on SiO2 Etching in Nanometer-Sized Narrow Spaces

〇Shohei Miyagawa1, Dai Ueda2, Yosuke Hanawa1, Hiroaki Kitagawa2, Naozumi Fujiwara2, Masayuki Otsuji1, Hiroaki Takahashi2, Kazuhiro Fukami3 (1.SCREEN Holdings Co., Ltd., 2.SCREEN Semiconductor Solutions Co., Ltd., 3.Kyoto Univ.)
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4:00 PM - 4:30 PM JST(7:00 AM - 7:30 AM UTC)

[18p-C41-6]In situ Observation of Nanoscopic Wetting by FM-AFM

〇Yuki Araki1, Taketoshi Minato2, Toyoko Arai1 (1.Kanazawa Univ., 2.IMS)
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4:30 PM - 4:45 PM JST(7:30 AM - 7:45 AM UTC)

[18p-C41-7]Analysis of Induction Charging Mechanism of Deionized Water Spray

〇Ittetsu Watanabe1, Kousei Ito1, Tatsuo Mori1, Yusuke Ichino1, Noriyuki Taoka1, Yoshiyuki Seike1 (1.Aichi Inst. Tech .)
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4:45 PM - 5:00 PM JST(7:45 AM - 8:00 AM UTC)Presentation by Applicant for JSAP Young Scientists Presentation Award

[18p-C41-8]Relationship between Charge Characteristics of Flying Droplets and Surface Potential Characteristics of SiO2 Wafers during Two-Fluid Spraying

〇(M1)Kousei Itou1, Ittetsu Watanabe1, Tatsuo Mori1, Yusuke Ichino1, Noriyuki Taoka1, Yoshiyuki Seike1 (1.Aichi Inst. Tech.)
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