[18p-D62-1~17] CS.1 Code-sharing Session of 2.3 & 7.4

2:30 PM - 2:45 PM JST(5:30 AM - 5:45 AM UTC)

[18p-D62-5] Effects of water cluster ion beam irradiation on free-standing graphene

〇(M1C)Ryosuke Shokatsu¹, Kosuke Moritani¹, Kozo Mochiji², Norio Inui¹ (1.Univ. of Hyogo, 2.PAI-NET)

Keywords:

graphene,SIMS,cluster ion

Graphene has been attracting attention as a high-performance next-generation material, but non-destructive cleaning of its surface is necessary for its use in devices. We have previously proposed a method for non-destructive cleaning and probing of the surface state using Ar cluster ion beams. In this study, we irradiated graphene with water cluster ion beams and observed the destruction characteristics. The results suggest that there is an energy threshold for graphene destruction by water cluster ions.