[18p-P02-1~30] 6.3 Oxide electronics

[18p-P02-7] Faburication of VO₂/AZO/Polyimide layered structure with transparent conductive AZO buffer and its optical switching characteristics

〇Rai Hiranabe¹, Peng Yu¹, Nagomi Watabe², Tian Lan², Kunio Okimura^1,2 (1.Graduate School of Engineering, Tokai Univ., 2.School of Engineering, Tokai Univ.)

Keywords:

Transparent Conductive Film,Vanadium Dioxide,Sputtering