Presentation Information
[18p-P02-8]Dependence of IGZO thin film TFT on oxygen flow rate
〇Meguru Nagai1, Reem Alshanbari2, Kunimitu Maejima3, Ioannis Kymissis2, Shinichi Yamamoto1 (1.Ryukoku Univ., 2.Columbia Univ., 3.Denshi Kagaku)
Keywords:
IGZO
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