[18p-P03-1~11] 6.6 Probe Microscopy

[18p-P03-8] Surface state transitions of Ar ion-milled Multi-Layer Ceramic Capacitor and their visualization using Kelvin Probe Force Microscopy

〇Toru Aiso¹, Yuki Inagi¹ (1.Hitachi High-Tech)

Keywords:

multilayer ceramic capacitor,Kelvin probe force microscopy,Ar ion milling

A cross-section of multilayer ceramic capacitor (MLCC) was irradiated with Ar ion beams of various accelerating voltages, and the potential distribution in the dielectric layer was measured while applying a 5 V between the MLCC electrodes using a Kelvin probe force microscopy. As a result, not only the potential distribution changes in the dielectric layer due to the accelerating voltage but also the potential changes with the elasped time were observed. Therefore, it is assumed that Ar ions are implanted into the sample surface will be desorbed over time, and the verification results will be reported.