[18p-P04-1~15] 12.2 Characterization and Materials Physics

[18p-P04-2] Pulsed-force mode AFM system for mechanical measurement in a wide range

〇(M1)HIROKI NOJIMA¹, Feng-Yueh Chan², Takahiro Kotani¹, Taiga Toshimitsu¹, Takayuki Uchihashi², Takaharu Okajima¹ (1.Info. Sci & Tech. Hokkaido Univ., 2.Nagoya Univ.)

Keywords:

Atomic Force Microscopy

In this study, we developed a pulsed-force atomic force microscopy (PF-AFM) system with a wide-range scanner for mechanics measurements in a large area. To precisely feedback the contact between an AFM tip and sample, our homemade PF-AFM was combined with a high-speed AFM (HS-AFM) that scans with an AFM tip. A LabVIEW-FPGA program was used to control the HS-AFM and the large-area scanner. We will present the details of the PF-AFM system and its performance.