Presentation Information

[18p-P07-5]Fabrication of crystalline membranes by exfoliating hafnia-based ferroelectiric films

〇Rintaro Maki1, Yufan Shen1, Xueyou Yuan2, Tomoaki Yamada2, Sota Fuji1, Daisuke Kan1, Yuichi Shimakawa1 (1.ICR, Kyoto Univ., 2.Nagoya Univ.)

Keywords:

ferroelectric films,hafnia,crystalline membranes


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