Presentation Information
[18p-P07-6]Temperature Dependence of C–V Curves of Metal/HfZrO2/Metal Capacitors
〇(M1)Aoi Teshima1, Eiji Yama1, Mikio Yamada1, Yusuke Ichino1, Tatsuo Mori1, Yoshiyuki Seike1, Katsunori Makihara2, Noriyuki Taoka1 (1.Aichi Inst. of Tech, 2.Nagoya Univ.)
Keywords:
ferroelectric
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