[19a-A22-1~12] (Open Symposium) Create the Future by Yourself! - New World Developed by Semiconductors

10:40 AM - 10:50 AM JST(1:40 AM - 1:50 AM UTC)

[19a-A22-6] The Challenge of Atomic-Level Processing - Through Oversea Training at U.S. University

〇Yusuke Nakatani¹ (1.Hitachi High-Tech)

Keywords:

Atomic Layer Etching