[19a-D62-1~9] 22.1 Joint Session M "Phonon Engineering"

9:00 AM - 9:15 AM JST(12:00 AM - 12:15 AM UTC)Presentation by Applicant for JSAP Young Scientists Presentation Award

[19a-D62-1] Thermal proximity sensing for the scanning probe-based thermal diffusivity measurement

〇(M2)Ryota Morioka¹, Meguya Ryu², Junko Morikawa¹ (1.Tokyo Tech, 2.AIST)

Keywords:

Thermal diffusivity,Temperature wave analysis,Atomic force microscopy

Thermal wave thermal analysis is a method to measure thermophysical property values from the phase delay and amplitude decay of the cyclic temperature response of a material to periodic heating. From the frequency dependence of the phase delay and amplitude decay, the proximity of the cantilever-type probe to the sample surface can be estimated. In this study, a robust local thermophysical property measurement method based on the principle of thermal wave thermal analysis was developed using a cantilever-type temperature sensor and periodic heating for thermal proximity sensing.