Presentation Information

[19a-D62-8]Development of the High-Throughput time-domain thermoreflectance technique

〇Hiroto Arima1, Yuichiro Yamashita1, Takashi Yagi1 (1.AIST)

Keywords:

Thermophysical properties,thin film,TDTR

The conventional time-domain thermoreflectance method (TDTR method) measures thermorefrectance respons by controling the arravial time between the pump and probe pulses. However, the conventiona TDTR method requires a long measurement time of about 10 minuit per measurement. In this present, we discussed the high-throughput TDTR method by simultaneous measurement using probe pulses with different delays for different wavelangths.

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