[19a-P08-1~9] 4 JSAP-Optica Joint Symposia 2024 (Poster)

English Presentation

[19a-P08-2] Silicon Waveguide Output Coupler Based on Nanohole Array

Ya-Cin Chung^1,2, Min-Hsiung Shih², Shu-Wei Chang², 〇Wan-Shao Tsai¹ (1.National Chung Hsing Univ., 2.Academia Sinica)

Keywords:

silicon photonics,waveguide couplers,nanohole array

Silicon waveguide output couplers based on nano-hole array structures is presented around the operation wavelength of 1550 nm. The proposed structure includes the grating, taper mode-size converter, a single-mode waveguide, and nanohole array. The devices are designed using the finite-difference time-domain simulations, and they are fabricated on silicon-on-insulator (SOI) substrates with electron-beam lithography followed by dry-etching through ridged structures. Compared with conventional grating couplers, the presented coupler shows less fabrication complexity since only one-step etching is required in both waveguide and coupler regions. A self-built measurement system is utilized to characterize the performance of fabricated devices. The proposed device provides an alternative method for vertical light coupling on the SOI platform