講演情報
[19a-P08-2]Silicon Waveguide Output Coupler Based on Nanohole Array
Ya-Cin Chung1,2, Min-Hsiung Shih2, Shu-Wei Chang2, 〇Wan-Shao Tsai1 (1.National Chung Hsing Univ., 2.Academia Sinica)
キーワード：
silicon photonics、waveguide couplers、nanohole array
Silicon waveguide output couplers based on nano-hole array structures is presented around the operation wavelength of 1550 nm. The proposed structure includes the grating, taper mode-size converter, a single-mode waveguide, and nanohole array. The devices are designed using the finite-difference time-domain simulations, and they are fabricated on silicon-on-insulator (SOI) substrates with electron-beam lithography followed by dry-etching through ridged structures. Compared with conventional grating couplers, the presented coupler shows less fabrication complexity since only one-step etching is required in both waveguide and coupler regions. A self-built measurement system is utilized to characterize the performance of fabricated devices. The proposed device provides an alternative method for vertical light coupling on the SOI platform
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