[19p-B2-1~14] 3.6 Laser processing

1:30 PM - 1:45 PM JST(4:30 AM - 4:45 AM UTC)

[19p-B2-3] First-principles calculations of energy transfer from femtosecond laser pulse to amorphous silicon

〇Eiyu Gushiken¹, Tomohito Otobe², Mizuki Tani², Shunsuke Yamada², Kenichi Ishikawa¹ (1.The Univ. of Tokyo, 2.QST)

Keywords:

ablation,time-dependent density functional theory,TDDFT,amorphous silicon

In order to understand the mechanism of ultrafast laser processing, energy transfer from femtosecond laser pulse to amorphous silicon was calculated based on time-dependent density functional theory, using atomic configurations obtained by density functional theory-based structure optimization calculations. It is found that the obtained atomic configurations have characteristic local structures and that the amount of energy absorption depends on the structures.