[19p-B2-1~14] 3.6 Laser processing

2:00 PM - 2:15 PM JST(5:00 AM - 5:15 AM UTC)

[19p-B2-5] In-line measurement of structure using optical interferometry in holographic laser processing

〇ren umetsu¹, Yoshio Hayasaki¹, Satoshi Hasegawa¹ (1.Utsunomiya Univ. Center for Optical Education and Research)

Keywords:

optical interferometry,femtosecond laser

Processing with ultrashort laser pulses is affected by various laser irradiation conditions, including pulse width, energy, and repetition rate. In general, the search for optimal laser irradiation conditions to obtain the desired processing requires repeated experiments using post-process measurements. In this study, inline measurements of laser-processed structures using optical interferometry were performed to efficiently search for laser irradiation conditions.