[19p-P02-1~13] 8.1 Plasma production and diagnostics

[19p-P02-1] Effects of Additional Gases on the Ions Generated by Atmospheric Pressure Plasmas

〇(B)Kokone Michikura¹, Xing Ying Low¹, Kenkichi Nagato¹, Hirofumi Kurita² (1.Natl. Inst. Tech. Kochi Col., 2.Toyohashi Univ. Tech.)

Keywords:

Atmospheric Pressure Plasma,Mass Spectrometry,Reactive Species

To investigate the effect of additional gases on reactive species generated by atmospheric pressure plasma jets, we analyzed ion mass spectra in the plasma jet by adding gases such as nitrogen and oxygen to career gases. Measurements were made under different conditions of flow rate of the added gas, and the composition changes in ions under each condition were investigated.