Session Details

[19p-P02-1~13]8.1 Plasma production and diagnostics

Thu. Sep 19, 2024 1:30 PM - 3:30 PM JST
Thu. Sep 19, 2024 4:30 AM - 6:30 AM UTC
P02 (Exhibition Hall A)

[19p-P02-1]Effects of Additional Gases on the Ions Generated by Atmospheric Pressure Plasmas

〇(B)Kokone Michikura1, Xing Ying Low1, Kenkichi Nagato1, Hirofumi Kurita2 (1.Natl. Inst. Tech. Kochi Col., 2.Toyohashi Univ. Tech.)

[19p-P02-2]Absolute densities of OH and H in jet part of atmospheric-pressure H2O/Ar plasma

〇(M1)Tsukasa Yamakawa1, Yoshinobu Inagaki1, Koichi Sasaki1 (1.Hokkaido Univ.)

[19p-P02-3]Non-uniform temporal variation of atmospheric-pressure plasma jets

〇Rina Matsumoto1, Penado Keith Nealson M1, Motoi Wada1, Harunori Yoshikawa1 (1.Doshish univ.)

[19p-P02-4]Relationship between Gas Flow Behavior and Optical Emission Propagation Phenomena

〇HIROMASA YAMADA1, NOBUYUKI ONO1 (1.NIT, Nagano College)

[19p-P02-5]Relationship between Charged Particles Behavior in Atmospheric Pressure Plasma Jet and Ambient Temperature

〇Soma Chiku1, Takuto Nozawa1, Shoma Sakamoto1, Hiromasa Yamada1 (1.NIT. Nagano college)

[19p-P02-7]Pulsed control and measurement of liquid injection using high-speed piezo valve

〇Yuki Kihira1, Yugo Nakaya1, Takumi Moriyama1, Keiichiro Urabe2 (1.HORIBA STEC, 2.Kyoto University)

[19p-P02-8]Optical emission spectroscopic measurement of hydrogen atoms produced in a locally inductively coupled atom source

〇Ryuki Otsuki1, Yuya Inokuchi1, Motoi Wada1, Toshiro Kasuya1 (1.Doshisha Univ)

[19p-P02-9]Measurement of Hydrogen Atom above Polyimide irradiated by H2 ICP

〇Shohei Nanya1, Keigo Takeda1, Mineo Hiramatsu1 (1.Meijo Univ.)

[19p-P02-10]Velocity distribution measurements of tungsten neutral particles

〇Tatsunobu Yoshitani1, Heun Tae Lee1 (1.Osaka Univ.)

[19p-P02-11]Analysis of electronic excitation and relaxation processes of Ar atom in deep oscillation magnetron sputtering (DOMS) plasma using an optical emission spectroscopy (OES)

〇Eisuke Yokoyama1, Yuuki Nakagawa1, Hiroki Kobayashi1, Nobuo Nishimiya1, Masaomi Sanekata1, Masahide Tona2, Hiroaki Yamamoto2, Keizo Tsukamoto2, Kiyokazu Fuke3, Keijiro Ohshimo4, Fuminori Misaizu4 (1.Tokyo Polytech. Univ., 2.Ayabo Corp., 3.Kobe Univ., 4.Tohoku Univ.)

[19p-P02-12]Observation of laser-induced fluorescence for neutral Ti particles produced by deep oscillation magnetron sputtering

〇yuuki nakagawa1, Hiroki Kobayasi1, Eisuke Yokoyama1, Nobuo Nishiniya1, Masaomi Sanekata1, Masahide Tona2, Hiroaki Yamamoto2, Keizo Tsukamoto2, Kiyokazu Fuke3, Keijiro Ohshimo4, Fuminori Misaizu4 (1.Tokyo Polytech. Univ., 2.Ayabo Corp., 3.Kobe Univ., 4.Tohoku Univ.)

[19p-P02-13]Ion energy distribution function for multi-component ions in deep oscillation magnetron sputtering using a reflectron time-of-flight mass spectrometer

〇Hiroki Kobayashi1, Yuuki Nakagawa1, Eisuke Yokoyama1, Nobuo Nishimiya1, Masaomi Sanekata1, Masahide Tona2, Hiroaki Yamamoto2, Keizo Tsukamoto2, Kiyokazu Fuke3, Keijiro Ohshima4, Fuminori Misaizu4 (1.Tokyo Polytech Univ., 2.Ayabo Corp., 3.Kobe Univ., 4.Tohoku Univ.)