Presentation Information

[19p-P05-1]【Absent】Homoepitaxial growth on β-Ga2O3 (010) and (001) substrates by mist-CVD method

〇Kazuaki Akaiwa1, Taketoshi Tomida2, Yongzhao Yao3, Koichi Kakimoto2, Akira Yoshikawa2 (1.Tottori univ., 2.Tohoku univ., 3.Mie univ.)

Keywords:

Gallium Oxides,mist-CVD growth


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