[19p-P05-1~33] 21 Joint Session K "Wide bandgap oxide semiconductor materials and devices" (Poster)

English Presentation

[19p-P05-33] Thermal Pressing Effect on sprayed n-type and p-type ZnO Nanoparticle Layers

〇(M2)Shrestha Dey Monty, Toshiyuki Yoshida, Yasuhisa Fujita

Keywords:

Thin-film growth,ZnO nanoparticles,Thermal pressing

In the realm of semiconductor processing, using semiconducting particle layers for TFT channel layers rather than thin films is becoming more and more popular due to the wider selectivity on substrates like flexible and/or bendable materials, etc., low processing costs, and huge area compatibility. In our laboratory, not only n-type but also p-type ZnO nanoparticle (NP) layers were formed [1,2]. However, the sheet resistance displayed extremely high values to prevent TFT applications. Many attempts have been made to decrease them, here, the effects of thermal pressing on layers of n-type and p-type ZnO nanoparticles are demonstrated.