Presentation Information
[19p-P05-4]Analysis of Stacking Faults Corresponding to Wake-type Etch Pits in β-Ga2O3 (001) Epitaxial Wafers
〇Tomomichi Terada1, Noriyuki Hasuike1, Toshiyuki Isshiki1, Kenji Kobayashi2, Takeshi Fujitani2, Yukari Ishikawa3, Yongzhao Yao3,4 (1.Kyoto Inst. Tech., 2.Hitachi High-Tech, 3.Japan Fine Ceramics Center, 4.Mie Univ.)
Keywords:
Gallium Oxide,stacking fault,etch pit
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