[19p-P06-1~50] 10 Spintronics and Magnetics (Poster)

[19p-P06-50] Fabrication of perpendicular magnetic anisotropic films on the side of uneven structures toward 3-dimensional devices

〇Yuya Yasuda¹, Kurokawa Yuichiro², Sumi Satoshi¹, Awano Hiroyuki¹, Tanabe Kenji¹ (1.Toyota Tech Inst., 2.Kyusyu Univ)

Keywords:

racetrack memory,3-dimensional devices,perpendicular magnetic anisotropic films

Recentry, research on three-dimensional magnetic devices has attracted much attention in the field of spintronics. Racetrack memory is expected to be a high-performance and inexpensive memory, and can be made even more ultrahigh-density by making it three-dimensional. However, in order to realize 3D racetracks, it is necessary to fabricate perpendicular magnetization films on the side portions of 3D structures as well. Therefore, we have succeeded in fabricating perpendicular magnetization films on the side surfaces of concavo-convex structures of substrates using the nanoimprinting method, and report here.