[19p-P07-1~13] 13.9 Compound solar cells

[19p-P07-10] Fabrication of Cu_xS, ZnS, SnS, and WS₂ thin films via reactive sputtering using metallic targets and sulfur plasma supply

〇(M2)Daiki Daiki Motai¹, Taichi Nogami¹, Issei Suzuki¹, Takahisa Omata¹ (1.Tohoku univ.)

Keywords:

sulfide thin films,transition metal dichalcogenides,reactive sputtering