Presentation Information
[19p-P07-10]Fabrication of CuxS, ZnS, SnS, and WS2 thin films via reactive sputtering using metallic targets and sulfur plasma supply
〇(M2)Daiki Daiki Motai1, Taichi Nogami1, Issei Suzuki1, Takahisa Omata1 (1.Tohoku univ.)
Keywords:
sulfide thin films,transition metal dichalcogenides,reactive sputtering
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