[20a-A32-1~11] 8.1 Plasma production and diagnostics

9:30 AM - 9:45 AM JST(12:30 AM - 12:45 AM UTC)

[20a-A32-3] Effect of magnet arrangement on RF ring-shaped magnetized sputtering
plasmas production using facing cylindrical targets

〇Bunta Kondo¹, Yasunori Otsu¹ (1.Saga University)

Keywords:

plasma