[20a-A32-1~11] 8.1 Plasma production and diagnostics

9:45 AM - 10:00 AM JST(12:45 AM - 1:00 AM UTC)

[20a-A32-4] Spatial distribution of radio-frequency magnetron plasma with PFA target for hydrophobic film preparation

〇Ryohei Kuno¹, Yasunori Ohtsu¹, Takeshi Yasunaga², Yasuyuki Ikegami³ (1.Saga Univ, 2.OECU, 3.Saga Univ. IOES)

Keywords:

radio-frequency magnetron plasma