[20a-A32-1~11] 8.1 Plasma production and diagnostics

10:00 AM - 10:15 AM JST(1:00 AM - 1:15 AM UTC)Presentation by Applicant for JSAP Young Scientists Presentation Award

[20a-A32-5] Positional distribution diagnosis of electron temperature, electron density, and EEDF of CF₄/O₂/Ar plasma based on tomographic optical emission spectroscopic measurement and argon collisional-radiative model

〇(DC)Yuya Yamashita^1,2, Kenta Doi³, Tetsuji Kiyota³, Yuchen Ye¹, Kazuki Shimatani¹, Wentao He¹, Hinata Hanyu¹, Wataru Kikuchi¹, Ayaki Sakurai¹, Atsushi Nezu¹, Hiroshi Akatsuka¹ (1.Tokyo Tech, 2.JSPS DC, 3.ULVAC)

Keywords:

optical emission spectroscopic measurement,spectral tomography,collisional-radiative model

Diagnosis of molecular mixed plasmas are difficult because of the complexity of atomic-molecular processes. In this study, the diagnosis of the mixed plasma was realized by focusing on the atomic and molecular processes of monatomic molecules in the mixed plasma. Optical emission spectra of CF₄/O₂/Ar inductively coupled plasma were acquired for tomographic emission spectroscopy measurement. The spectra were analyzed by the Ar collisional-radiative model. The electron temperature, electron density, and generalized electron energy distribution function (EEDF) were diagnosed as positional distributions. The EEDF was non-Maxwell distribution.