Presentation Information

[20p-A21-2]Optimization of long-time process using latent space in SiC solution growth

〇Takanao Sakamoto1, Kutsukake Kentaro1,2, Harada Shunta1,2, Toru Ujihara1,2 (1.Grad. Sch. Eng., Nagoya Univ., 2.IMaSS Nagoya Univ.)

Keywords:

SiC,Machine learning,semiconductor


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