The 85th JSAP Autumn Meeting 2024
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Presentation Information

2:15 PM - 2:30 PM JST(5:15 AM - 5:30 AM UTC)

[20p-A32-4]Development of rotational multi-magnetron sputtering plasma for an effective target-utilization

〇Himeko Umeda1, Yasunori Ohtsu1 (1.Saga Univ.)
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Keywords:

plasma

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