The 85th JSAP Autumn Meeting 2024
Advanced Search

Presentation Information

2:15 PM - 2:30 PM JST(5:15 AM - 5:30 AM UTC)

[20p-A32-4]Development of rotational multi-magnetron sputtering plasma for an effective target-utilization

〇Himeko Umeda1, Yasunori Ohtsu1 (1.Saga Univ.)

Keywords:

plasma

Comment

To browse or post comments, you must log in.Log in

Back to Session information