[20p-A32-1~11] 8.1 Plasma production and diagnostics

2:30 PM - 2:45 PM JST(5:30 AM - 5:45 AM UTC)

[20p-A32-5] Production of high-density hydrogen RF plasma using hybrid hollow electrode with cylindrical and ring-shaped grooves and permanent magnets

〇Kengo Tazume¹, Yasunori Ohtsu¹ (1.Saga Univ.)

Keywords:

RF plasma,Functional Thin Film,hydrogen plasma