[20p-A34-1~12] 3.8 Terahertz technologies

4:45 PM - 5:00 PM JST(7:45 AM - 8:00 AM UTC)

[20p-A34-12] Fabrication of 10 THz-band Si GRIN lens array with sub-wavelength structure

〇(M1)Soto Wada¹, Takuto Matsuki¹, Masahiro Ueda¹, Yuta Watanabe¹, Takumi Oie¹, Toshihiro Nakaoka¹, Toyoaki Suzuki², Yoshinori Shohmitsu³, Takehiko Wada⁴ (1.Sophia Univ., 2.ISAS/JAXA, 3.QUP/KEK, 4.NAOJ)

Keywords:

terahertz light,Si GRIN lens,subwavelength structure

The mid- to far-infrared range includes radiation from solid particles in interstellar space. To develop sensitive infrared detectors in the 30-60 µm wavelength range, our research group has studied Si GRIN lenses with a refractive index distribution based on a subwavelength structure. This lens is resistant to cooling cycles in this wavelength range and is suitable for integration into detectors because it is a planar lens. We report on the fabrication of Si GRIN lens arrays with a focus on small, arrayed detectors.