Presentation Information

[20p-C32-8]Application of a Machine Learning Method, Random Forest, to the Deposition Conditions of Doped Amorphous Silicon Films

〇CHENXI LI1, Huynh Thi Cam Tu1, Keisuke Ohdaira1 (1.JAIST)

Keywords:

amorphous silicon,machine learning,random forest

This study explores the use of the Random Forest (RF) algorithm within the ORANGE open-source data mining tool to predict deposition conditions for achieving high conductivity in amorphous silicon (a-Si) films. The model utilized k-fold cross-validation and Spearman correlations (SC) to enhance predictive accuracy. We demonstrated that the RF algorithm can reasonably predict the experimental conditions required for higher conductivity in both n-type and p-type a-Si films, offering significant potential for future advancements in the field.

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