[20p-P01-1~8] 6.2 Carbon-based thin films

[20p-P01-3] Depth Analysis of sp² Content in Atomic Hydrogen Exposed Hydrogenated Diamond-Like Carbon Films

〇Yuichi Haruyama¹, Akira Heya², Koji Sumitomo², Seigo Ito², Mao Yotsumoto³, Takahiro Maruyama³ (1.LASTI, Univ. of Hyogo, 2.Univ. of Hyogo, 3.Meijo Univ.)

Keywords:

diamond like carbon,photoelectron spectroscopy,depth analysis

The depth profile of the sp² content in the atomic hydrogen exposed hydrogenated diamond-like carbon (DLC) film was investigated by analyzing photoelectron spectroscopy spectra at three different photon energies and X-ray absorption spectroscopy (XAS) spectra. In C 1s core-level photoelectron spectra of the DLC film, it was observed that the sp² content increased with increasing the photon energy. This means that the sp² content increased with depth from the surface because the escape depth of the photoelectron becomes longer with increasing the photon energy. The sp² content of the DLC film was estimated by analyzing the photoelectron spectroscopy and XAS spectra. In the presentation, we will discuss the details of the sp² content in the DLC film in addition to the results of the XAS and Raman spectroscopy.