[20p-P01-1~8] 6.2 Carbon-based thin films

[20p-P01-4] Structural analysis of Zn-eluting Zn-DLC film

〇Kazuhiro Kanda¹, Koji Nakanishi¹, Tsuneo Suzuki², Hiroki Akasaka³, Yasuharu Ohgoe⁴, Masanori Hiratsuka⁵, Kenji Hirakuri⁴ (1.Lasti, Univ. Hyogo, 2.Nagaoka Univ. Tech., 3.Eng., Tokyo Inst. Tech., 4.Tokyo Denki Univ., 5.Tokken Inc.)

Keywords:

diamond-like carbon film,Rutherford Backscattering Spectrometry,X-ray Absorption Spectrometry

Structural analysis of Zn-doped DLC films leaching Zn, which promotes bone formation, was performed using a high-energy ion beam and synchrotron radiation. 41% and 220 nm were obtained for the Zn/C ratio and the thickness of the Zn-DLC film, respectively, from RBS measurements. From XAS measurements, Zn in the Zn-DLC film was found to be a metal. On the other hand, the electronic state of C is affected by Zn, suggesting that Zn exists in the Zn-DLC film in the form of metal particles.