Presentation Information
[20p-P01-8]Effect of sulfuric acid immersion on the electrical insulation and surface properties of amorphous carbon films.
〇EITO ICHIJO1, KAZUYA KANASUGI1, MASANORI HIRATSUKA2, HIDEKI NAKAMORI3, KENJI HIRAKURI1 (1.Denki Univ., 2.Tokken Inc., 3.Nanotec Co.)
Keywords:
DLC,Electrical insulation,Acid resistance
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