The 85th JSAP Autumn Meeting 2024
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Oral presentation8 Plasma Electronics : 8.7 Plasma Electronics Invited Talk

[17a-C41-3~3]8.7 Plasma Electronics Invited Talk

Tue. Sep 17, 2024 11:00 AM - 11:45 AM JST
Tue. Sep 17, 2024 2:00 AM - 2:45 AM UTC
C41 (Hotel Nikko 4F)
Kazunori Koga(Kyushu Univ.)
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11:00 AM - 11:45 AM JST(2:00 AM - 2:45 AM UTC)

[17a-C41-3][INVITED] Physics of plasma processing for semiconductor manufacturing in the Angstrom-node generation

〇Satoshi Hamaguchi1 (1.Osaka Univ.)
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