Session Details
[17p-P05-1~1]13.4 Si processing /Si based thin film / MEMS / Equipment technology
Tue. Sep 17, 2024 4:00 PM - 6:00 PM JST
Tue. Sep 17, 2024 7:00 AM - 9:00 AM UTC
Tue. Sep 17, 2024 7:00 AM - 9:00 AM UTC
P05 (Exhibition Hall A)
[17p-P05-1]Compact Jig for Alignment of Two Substrates and Its Assessment of Alignment Accuracy
〇Atsushi Miura1, Keita Funayama1, Satoshi Gotoh1, Katsuharu Okuda1, Hiroya Tanaka1 (1.TOYOTA CRDL)