[17p-P05-1~1] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[17p-P05-1] Compact Jig for Alignment of Two Substrates and Its Assessment of Alignment Accuracy

〇Atsushi Miura¹, Keita Funayama¹, Satoshi Gotoh¹, Katsuharu Okuda¹, Hiroya Tanaka¹ (1.TOYOTA CRDL)

Keywords:

substrate bonding,alignment,Simple jig

Microfabrication is widely used in manufacturing processes for integrated circuits, sensors, and other industrial applications. One representative example of microfabrication technology is photolithography. When creating complex patterns using photolithography, precise alignment between the wafer and the mask/mold is necessary due to the need for multiple exposure and transfer steps. In this study, we developed a simple and compact fixture for aligning substrates using a commercially available xyz rotational stage and two CCD cameras. We evaluated the alignment accuracy of the fixture by aligning two substrates and calculating the center position deviation from the edge misalignment of each substrate.