[22p-12H-1~1] 8.7 Plasma Electronics Invited Talk

1:00 PM - 1:45 PM JST(4:00 AM - 4:45 AM UTC)

[22p-12H-1] [The 24th Outstanding Achievement Award Speech] Civilization and Culture Pioneered by Low-temperature Plasma

〇Masaru Hori¹ (1.Nagoya Univ.)

Keywords:

plasma

Based on the radical reaction fields in process plasmas discovered and systematized over the past 40 years, the current status of radical-controlled plasma processes ranging from semiconductor to environmental and biological applications is described. Then, future plasma processes utilizing radicals are outlined. Furthermore, the appeal of low-temperature plasma in creating a civilization that will pioneer the culture of future societies where plasma is used everywhere and will support the future of humanity is described.