Presentation Information
[23a-13M-5]Laser-induced Nitridation of Metals by Flowing Nitrogen Gas Mixed with Hydrogen
〇Shigeki Matsuo1, Mizuno Haruto1, Toshiaki Kondo2 (1.Shibaura Inst. of Tech., 2.Aichi Univ. of Tech.)
Keywords:
nitridation,laser,hydrogen
We are aiming for localized surface nitridation using laser irradiation. However, oxidation is far more likely to occur than nitridation, and oxidation will occur even if the amount of oxygen is small in the atmosphere. Thus, in order to suppress oxidation, we attempted laser irradiation while flowing nitrogen gas mixed with hydrogen. The composition of the laser-irradiated samples was analyzed by X-ray photoelectron spectroscopy, and peaks that appeared to be nitrogen were observed on the Al, Ti, and Si substrates, suggesting that nitridation had occurred.