Presentation Information
[23a-P08-6]Simulation study of electron beam behavior in the gaseous atmosphere
Ryuki Tanaka1, Jun Yamaguchi1, 〇Masaaki Yasuda1 (1.Osaka Met. Univ.)
Keywords:
electron beam,gaseous atmosphere,simulation
Electron beam behavior in a gaseous atmosphere was analyzed using an electron scattering model that incorporates elastic collisions with gas atoms and impact ionization. Monte Carlo simulation, which stochastically calculates the interaction between electrons and gas atoms, was used to analyze electron trajectories in gas.