Presentation Information
[23p-13M-16]Two-photon Polymerization using GHz Burst Mode Femtosecond Laser Processing
〇Ashkan MomeniBidzard1, Koji Sugioka1 (1.RIKEN Center for Advanced Photonics)
Keywords:
Femtosecond Laser Processing,GHz burst,Two-photon polymerization
The femtosecond laser processing in GHz burst mode has recently provided a new pathway for improving laser-induced microfabrication. In this context, we demonstrated capability of the GHz burst mode laser processing toward efficiently laser ablation of silicon, formation of novel two-dimensional laser-induced periodic surface structures, and improvement of two-photon polymerization (TPP). This technique enables efficient absorption of laser energy in multiple pulses at ultrafast GHz repetition rates in bursts that should be further investigated for laser processing applications. In this study, we investigated TPP in SU8 using GHz bursts of femtosecond laser pulses by experiment and simulation to improve the fabrication resolution and clarify the responsible mechanism.