Presentation Information
[23p-P02-22]Fabrication of vanadium oxide thin films by a chemical solution deposition method and its application to high-sensitivity pH sensors toward biosensing devices
〇(M1C)Yoshiki Tate1, Ryo Michibata1, Aoi Yamamoto1, Yuichi Hirofuji1, Kazuto Koike1, Takeshi Rachi2, Ryotaro Kumashiro3, Nobuya Hiroshiba1 (1.NMRC, OIT, 2.KISTEC, 3.AIMR, Tohoku Univ.)
Keywords:
pH sensor,VOx