Presentation Information

[24p-11E-1]Transfer printing of GaAs nanobeam cavity embedding InAs QDs on SiN waveguide

〇(DC)Natthajuks Pholsen1,2, Akinari Fujita3, Makoto Okano4, Nicolai Bart5, Arne Ludwig5, Andreas Wieck5, Yasutomo Ota3, Satoshi Iwamoto1,2 (1.RCAST, Univ. of Tokyo, 2.IIS, Univ. of Tokyo, 3.Keio Univ., 4.AIST, 5.Ruhr Univ. Bochum)

Keywords:

integrated quantum photonics,silicon nitride,quantum dot single photon source

Integrated quantum photonics based on silicon nitride (SiN) is attracting a lot of attention as a platform for quantum technologies. However, there is a lack of efficient deterministic single photon sources (SPSs) for SiN. Previously, our group demonstrated that a GaAs photonic crystal (PhC) nanobeam cavity embedding InAs/GaAs quantum dots (QDs) can efficiently couple the QD emission into an underlying Si waveguide and possibly on SiN as well. Nonetheless, experimental demonstration of coupling to a SiN waveguide has not been presented yet. Here, we demonstrate the coupling of a GaAs PhC nanobeam cavity with InAs/GaAs QDs to an underlying SiN waveguide. The coupling efficiency from the cavity into the waveguide was estimated to be 40%.