[24p-P14-1~3] 13.5 Semiconductor devices/ Interconnect/ Integration technologies

English Presentation

[24p-P14-1] Blood oxygen and heart rate monitoring by a flexible hybrid electronics device fabricated by multilayer screen-printing

〇Gabor Mehes^2,1, Ayako Yoshida¹, Yoshihiro Okuyama¹, Masaki Murakata¹, Takeo Shiba¹, Shizuo Tokito¹ (1.Yamagata Univ., 2.Waseda Univ.)

Keywords:

screen-printing,flexible hybrid electronics (FHE),blood oxygen monitoring

Most flexible hybrid electronics (FHE) devices utilize energy-and cost intensive photolithographic processes for the fabrication of electrical circuitry. Here we demonstrate a potentially low-cost screen printing-based hybrid electronics system that utilizes commercially available IC chips for advanced sensing and data processing. We tackle the low integration density of typical single-layer screen-printed devices by vertically integrating four conducting and two isolating printed layers, where signal lines can traverse several layers to connect IC chips, increasing the integration density. We fabricated our SpO₂ and heart rate monitoring devices on low-cost flexible plastic substrates, achieving 1.5 mm thickness. Worn on forehead, this vital sign monitor could detect the onset of induced hypoxia 10 seconds faster compared to a commercially available finger-based reference sensor.
References
[1] Yoshida, Méhes (equal contributions), et al. Adv. Electron. Mater. 2023, 2300615.