Presentation Information
[25p-12H-10]The evalution method for the Gas barrier properties of DLC films produced by Hydrogen Treatment under Ultra-High Pressure
Terumi Yasui1, 〇Thitikorn Chamchuang1, Yu Owada1, Keiji Komatsu1, Hidetoshi Saitoh1 (1.Nagaoka University of Technology)
Keywords:
DLC films,Ultra-High pressure hydrogen treatment,Gas barrier properties
Amorphous hydrogenated carbon films have low hydrogen permeability, so they are being used as films to prevent hydrogen embrittlement of metals. In this study, we will devise an experimental method to confirm the hydrogen barrier properties of amorphous hydrogenated carbon films using ultrahigh pressure hydrogen of 100 MPa or higher, which is a supercritical state. A cold isostatic pressing (CIP) device was used to treat the amorphous hydrogenated carbon film with ultra-high pressure hydrogen. By analyzing the structure and hydrogen composition of the film before and after treatment, it is expected that it will be possible to evaluate the hydrogen barrier performance of the amorphous hydrogenated carbon film. Electron cyclotron resonance plasma chemical vapor deposition (ECR plasma CVD) was used for film formation, and structural analysis including soft X-ray emission spectroscopy (SXES) was performed.